I-wafer yenziwe nge-silicon ehlanzekile (Si).Ngokujwayelekile ihlukaniswe ngokucaciswa okungu-6-intshi, 8-intshi, no-12-intshi, iwafa ikhiqizwa ngokusekelwe kule wafer.Ama-wafer e-silicon alungiselelwe kusuka kuma-semiconductors ahlanzekile ngokusebenzisa izinqubo ezinjengokudonsa ngekristalu nokusika abizwa ngokuthi ama-wafers beca.sebenzisa ziyindilinga.Izakhiwo ezahlukahlukene zesekethe zingacutshungulwa kumawafa e-silicon ukuze zibe yimikhiqizo enezakhiwo ezithile zikagesi.imikhiqizo yesekethe esebenzayo edidiyelwe.Ama-wafer adlula ochungechungeni lwezinqubo zokukhiqiza ama-semiconductor ukuze akhe izinhlaka zesekethe ezincane kakhulu, bese ziyasikwa, zipakishwe, futhi zihlolwe zibe ama-chips, asetshenziswa kakhulu emishinini eyahlukene kagesi.Izinto ze-wafer zihlangabezane neminyaka engaphezu kwengu-60 yokuvela kwezobuchwepheshe kanye nokuthuthukiswa kwezimboni, zakha isimo sezimboni esibuswa i-silicon futhi sengezwe ngezinto ezintsha ze-semiconductor.
Ama-80% omakhalekhukhwini namakhompyutha omhlaba akhiqizwa eChina.I-China ithembele ekuthengisweni kwamanye amazwe ngo-95% wama-chips ayo asebenza kahle kakhulu, ngakho i-China ichitha ama-US$220 wezigidigidi minyaka yonke ukungenisa ama-chips, okuyisilinganiso esiphindwe kabili uwoyela othengwa minyaka yonke waseChina.Zonke izinto zokusebenza nezinto eziphathelene nemishini ye-photolithography nokukhiqizwa kwe-chip nazo zivinjelwe, njengama-wafers, izinsimbi ezihlanzekile kakhulu, imishini yokufaka, njll.
Namuhla sizokhuluma kafushane ngesimiso sokusulwa kokukhanya kwe-UV kwemishini yama-wafer.Lapho ubhala idatha, kuyadingeka ukufaka inkokhiso esangweni elintantayo ngokusebenzisa i-VPP enamandla amakhulu esangweni, njengoba kuboniswe emfanekisweni ongezansi.Njengoba ishaja ejovwe ingenawo amandla okungena odongeni lwamandla efilimu ye-silicon oxide, ingagcina isimo se-quo kuphela, ngakho-ke kufanele sinikeze inkokhiso inani elithile lamandla!Lesi yisikhathi lapho ukukhanya kwe-ultraviolet kuyadingeka.
Lapho isango elintantayo lithola imisebe ye-ultraviolet, ama-electron asesangweni elintantayo athola amandla e-ultraviolet light quanta, futhi ama-electron aba ama-electron ashisayo anamandla okungena odongeni lwamandla lwefilimu ye-silicon oxide.Njengoba kuboniswe emfanekisweni, ama-electron ashisayo angena efilimu ye-silicon oxide, ageleze aye ku-substrate nesango, futhi abuyele esimweni sokusulwa.Umsebenzi wokusula ungenziwa kuphela ngokuthola imisebe ye-ultraviolet, futhi awukwazi ukusulwa nge-elekthronikhi.Ngamanye amazwi, inani lamabhithi lingashintshwa kuphela ukusuka ku-"1" liye ku-"0", futhi libheke okuphambene.Ayikho enye indlela ngaphandle kokusula konke okuqukethwe kwe-chip.
Siyazi ukuthi amandla okukhanya ahambisana ngokuphambene nobude beza beza bokukhanya.Ukuze ama-electron abe ama-electron ashisayo futhi ngaleyo ndlela abe namandla okungena efilimu ye-oxide, ukushiswa kokukhanya okunobude obufushane begagasi, okungukuthi, imisebe ye-ultraviolet, idingeka kakhulu.Njengoba isikhathi sokusula sincike enanini lama-photon, isikhathi sokusula asikwazi ukufinyezwa ngisho nasemaza amaza amafushane.Ngokuvamile, ukusula kuqala lapho ubude begagasi buba ngu-4000A (400nm).Ngokuyisisekelo ifinyelela ku-saturation cishe ku-3000A.Ngaphansi kuka-3000A, noma ubude begagasi bumfushane, ngeke kube nomthelela esikhathini sokusula.
Izinga lokusulwa kwe-UV ngokuvamile liwukwamukela imisebe ye-ultraviolet enobude obunembile obungu-253.7nm kanye namandla angu-≥16000 μ W/cm².Umsebenzi wokusula ungaqedwa ngesikhathi sokuchayeka esisukela kumizuzu engama-30 kuye kwamahora ama-3.
Isikhathi sokuthumela: Dec-22-2023